• 日本雅马拓YAMATO等离子清洗机

    详细信息


    日本雅马拓YAMATO等离子清洗机用途:去除各种半导体材料表面的有机膜, 对材料表面清洗、重整,以及材料表面的蚀刻。

    日本雅马拓YAMATO等离子清洗机规格说明:
    型号 V-1000 V-1000X(双工作台) V-1000XS
    *等离子工作模式 RIE and DP (RIE : 物理冲击型,DP : 化学反应型)
    *主件
    电极结构 平行平板式
    平台尺寸 280mmW×280mmD 300mmW×300mmD(Double stage) 400mmW×375mmD
    工作室尺寸 400mmW×400mmD×380mmH 400mmW×400mmD×380mmH 600mmW×554mmD×440mmH
    真空测量 电容压力计
    反应气体系统 双系统
    控制器 Programmable controller
    显示屏 Programmable terminal (touch panel)
    *射频能量供应
    输入 AC 200/220/380V,Three phase,
    高频输出功率 1,000W 1,000 & 1,500W
    发振器 水晶发振
    发振频率 13.56 MHz
    匹配调节 自动调整
    *真空泵 (Vacuum Pump)
    Displacement (置换量) 670 & 1,000 liters/min. 670 & 1,500 liters/min. 1,000 & 1,500 liters/min.
    Inlet configuration(进口配置) NW40 with a flexible stainless steel hose (1 meter long)
    Outlet configuration(出口配置) NW40
    *气体系统(Gas Systems
    Purge gas(净化气体) Nitrogen (N2) and a regulator (3 kgf/cm2) with a manometer
    Driving gas(推进气体) Air or nitrogen (N2) and a regulator (alarm contact at 10 kgf/cm2) with a manometer
    Reaction gas G1(反应气体1 Oxygen (O2) and a mass flow controller (1000 secm)
    Reaction gas G2(反应气体2 Argon (Ar) and a mass flow controller (100 secm)
    *Safety Mechanisms(安全机构)
    System Protections(系统保护) *Oscillator protection circuit *Front-door interlock switch (interlocked with the startup)
    *Safety switches (interlock switch on the side panels) *Vacuum leak test function
    *Air-purge end buzzer *Alarm buzzer *Emergency stop push-button switch
    Actions against a trouble of the vacuum pump(真空泵故障反应) The plasma scrubber takes the counteractions listed below and show an Alarm message on its display when something wrong happens on the vacuum pump.
    *The main valve closes *The gas feed valve closes *The isolation valve closes
    *The oscillator stops outputting *Treatment process is suspended *The Alarm buzzer starts sounding
    * The alarm indicator lamp lights up to notify the trouble of the vacuum pump
    *The treatment process timer stops
    *REQUIRED UTILITIES(必要的配套设施)
    *Power Supply(电源供应)
    Main unit with vacuum pump
    (配真空泵主机)
    Three phases, AC220V, 30 A, 60Hz (with an accessory power cable of 3 meters long, and exposed crimp-style terminals of 8 millimeters long)
    *Gases(气体)
    Driving gas (推进气体) Air or nitrogen (N2) (Feed pressure: 5~7 kgf/cm2)
    Purge gas(净化气体) Nitrogen (N2) (Feed pressure: 2~7 kgf/cm2)
    Reaction gas G1(反应气体1 Oxygen (O2) (Feed pressure: 1.5 kgf/cm2)
    Reaction gas G2(反应气体2 Argon (Ar) (Feed pressure: 1.5 kgf/cm2)
    Connection port(连接端口) 1/4" swagelok joint bulkhead union (SS-400-61)
      Note: Pressure regulators, filters and other protective devices shall be prepared by others.
    *Connection Diameter of the Discharge Duct (and inlet Port)( 流注输送管口径)
    Vacuum pump's inlet port NW4O (with a flexible stainless steel hose of 1 meter long)
    Vacuum pump's outlet port NW4O
    Main unit's ozone outlet port 163mm diameter
    Oscillator's ventilation port 163mm diameter
      Note: Every port has a connector designed for a flexible hose. Connect a duct to these inlet and outlet ports.
     
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